Pressure Sensor Workshops for College Faculty
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4-day SCME Pressure Sensor Cleanroom Workshop
This workshop is for College Faculty only!
Workshop Description
The purpose of these workshops is to provide an opportunity to learn how to integrate Microsystems Technology into STEM curriculum. You will learn how to use select SCME’s kits in the classroom and be provided hands-on experience on the process steps for fabricating a MEMS micro-pressure sensor in a research cleanroom.
Each participant will actively complete the following SCME kits:
Crytallography, Rainbow Wafer, Pressure Sensor Model, Lift-off, Pressure Sensor Process, MEMS: Making Micro Machines, MEMS Innovators
Cleanroom activities:
PS Activity 1: Plasma Etch and resist strip, PS Activity 2: Frontside Lithography and Metal Deposition, PS Activity 3: Test and Probe
To see a complete set of these Learning Modules - create an account on this website - login and go to the Educational Materials link. Scroll down to view the "Workshop at a Glance" information.
**** Click to Apply - Deadline August 2 -
Once accepted - please review the following information and follow these instructions
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Pressure Sensor and Kit Workshop – SCME – UNM MTTC – August 10 – 13, 2010 |
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Day |
Group |
Morning 8:00-11:30 |
Lunch at the MTTC 11:30-12:30 |
Afternoon 12:30-17:00 |
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8/10 |
ALL |
Introductions Learning Module Overview MEMS DVD / discussion Or Remedial Safety for those who didn’t complete safety online module Website Overview Homework: (DVD ACs) |
Lunch |
Process flowchart followed by flash movie PS process storyboard Safety review and Cleanroom tour – 2hr Written safety test – 50min |
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8/11 |
A |
PS Activity 1 – Cleanroom |
Lunch |
MEMS DVD assessment / discussion. Pressure Sensor Model Kit |
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B |
Review DVD ACs MEMS DVD assessment / discussion. Pressure Sensor Model Kit |
PS Activity 1 - Cleanroom |
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8/12 |
A |
PS Activity 2 |
Lunch |
Crystallography and Rainbow wafer kits |
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B |
Crystallography and Rainbow wafer kits |
PS Activity 2 |
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8/13 |
ALL |
Crystallography Assessment (in groups) Lift-off Kit Micromachining PPT / crossword puzzle |
Lunch |
PS Activity 3 – 2hr Pressure Sensor Process Kit WB assessment Wrap-up |
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Evening (TBD) Optional |
A and B |
MEMS Innovators Kit Overview (As time Permits) |
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