Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  A brief history of the term Micro Electro Mechanical Systems (MEMS)

See a map of who's downloading (last updated 7/11/16)

 

 

These events are intended for High-School and College STEM Faculty only.

You are invited to attend any or all three of these events.  SCME is offering these hands-on microsystems "kits for the classroom" workshops to qualified secondary and post-secondary instructors.  The purpose is to bring Micro Electro Mechanical (MEMS) concepts into the STEM classroom and hopefully "jazz" your students - give them more reasons to want to study STEM topics.

Accepted participants will receive a stipend for attending each workshop they attend - Enrollement is limited to 20 educators per workshop - Apply Now!

 

 

Scroll down for descriptions, links to agendas, link to register, and a map to where we are located!

NOTE: All Workshops require some preparation so you can "hit the ground running"

Click here to find us:  MAP To the MTTC <= Note, ALL the workshops will be at UNM's MTTC. 

The 2/26/2010 workshop will NOT be held at East Mountain HS, IT HAS BEEN MOVED TO UNM's MTTC

Click below to apply! 

SCME's Workings of Microystems Workshop Spring Series Application

For more information, feel free to contact Anna Garden by email: This email address is being protected from spambots. You need JavaScript enabled to view it. or phone: 505 272 7150

Date

Workshop Description

January 22, 2011

10am - 3pm

 

Crystals and Rainbows Workshop - MTTC

Location: UNM MTTC

This workshop covers several important introductory topics related to MEMS fabrication: Crystallography, Oxidation, Light Interference and Etch. Participants will complete several activities to help them better identify crystal planes of silicon wafers, determine silicon oxide thickness based on its color, and calculate and estimate the growth rates and the etch rates of silicon dioxide. Workshop discussions will include where and how this material and the related activities can be incorporated into an existing curriculum.

Click here for a detailed Crystals and Rainbows Agenda

 

Read the following before the workshop, required:

Crystallography Overview Participant Guide

Rainbow Wafer Activity

Optional Reading:

 

Etch Overview for Microsystems - related to the Rainbow Wafer

February 26, 2010

10am-3pm

Pressure Sensor Process Workshop

Location: UNM's MTTC

This workshop covers a fabrication process for a MEMS pressure sensor. After studying the 10 step process, participants will complete two of the process steps (lift-off and anisotropic etch) using actual fabricated chips. Participants will also study 10 chips that represent each step of the fabrication process. They will identify the process represented by each chip and arrange the chips in the correct process order. Workshop discussions will include where and how this material and the related activities can be incorporated into an existing curriculum.

Click here for a detailed Pressure Sensor Process Agenda

Read the following before the workshop:

Participants need to read the following educational materials prior to the workshop:

  1. Pressure Sensor Process Primary Knowledge (PK)
  2. Deposition PK (optional)
  3. Photolithography PK (optional)
  4. Etch PK (optional)
All found within the MTTC Pressure Sensor Participant Guide

March 26, 2010

10:00am-3:00pm

MEMS Innovators Workshop

Location: UNM MTTC

This workshop is a capstone activity that encompasses MEMS applications, MEMS components, and MEMS fabrication. Participants will work in teams to design and develop a component for a MEMS that addresses a specific problem in one of three fields: biomedical, environmental, or consumer product. Once the component is designed and constructed, the team will develop a process flow which addresses the fabrication building blocks needed to build the MEMS component. Workshop discussions will include where and how this material and the related activities can be incorporated into an existing curriculum.

You are encouraged to bring your laptop and digital camera!

Click here for a detailed MEMS Innovators Agenda

Read the following before the workshop:

  1. MEMS Applications
  2. Sensors, Transducers, & Actuators
  3. MEMS Micromachining
  1. Click here to find us:  MAP To the MTTC
  2. Click here to find the second workshop: Map to East Mountain High School

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