Have you ever wondered where the term "MEMS" came from?
Read J.E. Wood's account:
Click Here: A brief history of the term Micro Electro Mechanical Systems (MEMS)
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January 2011 Pressure Sensor Workshop for College Faculty
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5-day SCME Pressure Sensor Cleanroom Workshop
This workshop is for College Faculty only!
Workshop Description
The purpose of these workshops is to provide an opportunity to learn how to integrate Microsystems Technology into STEM curriculum. You will learn how to use select SCME’s kits in the classroom and be provided hands-on experience on the process steps for fabricating a MEMS micro-pressure sensor in a research cleanroom.
Each participant will actively complete the following SCME kits:
Crytallography, Rainbow Wafer, Pressure Sensor Model, Lift-off, Pressure Sensor Process, MEMS: Making Micro Machines, MEMS Innovators.
Required Preparation
Participants are required to complete the online safety learning module (see links below) and score above a 90% on the online practice exam. A written exam will be given covering the materials which must be passed before entry into the cleanroom will be allowed. Revieiwing the online educaitonal materials pertaining to this topic is encouraged.
Cleanroom activities:
PS Activity 1: Plasma Etch and resist strip, PS Activity 2: Frontside Lithography and Metal Deposition, PS Activity 3: Test and Probe
To see a complete set of these Learning Modules - create an account on this website - login and go to the Educational Materials link. One item you may wish to review is the:Pressure Sensor Fabrication Module
**** Click to Apply - Deadline December 13 -
Once accepted - please review the following information and follow these instructions
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Pressure Sensor and Kit Workshop – SCME – UNM MTTC – January 4 – 8, 2011 |
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Day |
Group |
Morning 8:00-11:30 |
Lunch at the MTTC 11:30-12:30 |
Afternoon 12:30-17:00 |
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Day 1 |
ALL |
Introductions Learning Module Overview MEMS DVD / discussion Or Remedial Safety for those who didn’t complete safety online module Website Overview Homework: (DVD ACs) |
Lunch |
Process flowchart followed by flash movie PS process storyboard Safety review and Cleanroom tour – 2hr Written safety test – 50min |
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Day 2 |
A |
PS Activity 1 – Cleanroom |
Lunch |
MEMS DVD assessment / discussion. Pressure Sensor Model Kit |
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B |
Review DVD ACs MEMS DVD assessment / discussion. Pressure Sensor Model Kit |
PS Activity 1 - Cleanroom |
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Day 3 |
A |
PS Activity 2 |
Lunch |
Crystallography and Rainbow wafer kits |
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B |
Crystallography and Rainbow wafer kits |
PS Activity 2 |
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Day 4 |
ALL |
Crystallography Assessment (in groups) Lift-off Kit Micromachining PPT / crossword puzzle |
Lunch |
PS Activity 3 – 2hr Pressure Sensor Process Kit WB assessment Wrap-up |
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Day 5 |
A and B |
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