5-day SCME Pressure Sensor Cleanroom Workshop

This workshop is for College Faculty only!

Workshop Description

The purpose of these workshops is to provide an opportunity to learn how to integrate Microsystems Technology into STEM curriculum.  You will learn how to use select SCME’s kits in the classroom and be provided hands-on experience on the process steps for fabricating a MEMS micro-pressure sensor in a research cleanroom.  

Each participant will actively complete the following SCME kits:

Crytallography, Rainbow Wafer, Pressure Sensor Model, Lift-off, Pressure Sensor Process, MEMS: Making Micro Machines, MEMS Innovators.

Required Preparation

Participants are required to complete the online safety learning module (see links below) and score above a 90% on the online practice exam.  A written exam will be given covering the materials which must be passed before entry into the cleanroom will be allowed.   Revieiwing the online educaitonal materials pertaining to this topic is encouraged.

Cleanroom activities:

PS Activity 1: Plasma Etch and resist strip, PS Activity 2: Frontside Lithography and Metal Deposition, PS Activity 3: Test and Probe

To see a complete set of these Learning Modules - create an account on this website - login and go to the Educational Materials link.  One item you may wish to review is the:Pressure Sensor Fabrication Module

**** Click to Apply - Deadline December 13 -

Once accepted - please review the following information and follow these instructions

Workshop at a Glance