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Dr. Pleil with Student at the MTTC
Teaching students about Microsystems Fabrication
Barbara Lopez at the MTTC
Teaching students the importance of safety in the clean room
Mathew, Olivia and Andy
Developing the chamber (backside) pressure sensor pattern
Olivia in the MTTC
Olivia is an EET student from Ivy Tech learning about MEMS fabrication
March Reactive Ion Etcher
Etching the Silicon Nitride hard mask
Rick and Andy using the March RIE
Rick and Andy etching the backside chamber mask pattern into the silicon nitride hard mask.
Rick using the |dq|AAA|dq| rule
Rick from Rio Salado learning how to fabricate a MEMS Pressure Sensor at UNM's MTTC cleanroom
SCME PS Workshop
Team Work during the SCME 8/2015 PS Workshop
Metal Evaporation
SCME Workshop - Cr/Au evaporation

Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  pdf  A brief history of the term Micro Electro Mechanical Systems (MEMS)

See a map of who's downloading (last updated 7/11/16)


Micro Nano Tech Conference 1

Micro Nano Tech Conference 1

Educating and Preparing the Emerging Technology Workforce

May 9 - 11

University of New Mexico

Albuquerque, NM

Click here to see The MNT Presentations



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****NEW: View and Print the complete >>MNT Program<< PDF File

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The National Science Foundation (NSF) Advanced Technological Education (ATE) Centers of Excellence sponsoring this event:

(Click on the icons for more information about each center)

MATEC logo.jpgNEATEC_logo_1_color4_cropped(1).jpg

This event is intended for college faculty and administration, STEM educators and industry

Where to Stay and Transportation Info, click for:  Logistical Information for our out of town participants!

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Micro Nano Tech Conference 1 is for you if you are:

  • College faculty and want to revitalize your curriculum to prepare your students for upcoming tech jobs
  • In academic administration and want to learn about educating students for jobs in emerging technologies
  • In industry and want to offer input about the training of your technical workforce

At Micro Nano Tech Conference 1 you will find everything you need to integrate emerging technology resources into your STEM classes, get help starting your own micro/nano program, and learn best practices for working with local industry, community leaders, and college administration.

Join us at Micro Nano Tech Conference 1, hosted by a consortium of NSF ATE Centers of Excellence.

Several hands-on workshops, sessions and interactive discussion with industry and experienced micro-nano education implementors will be provided.

Topics presented will answer questions such as:

  • Where are the jobs?
  • What type of skills are required for micro nano technologists?
  • Where can you get learning modules and hands-on kits and activities which showcase micro nano?
  • How do I integrate these into more traditional STEM programs?
  • What can I do in the classroom to demonstrate nano and micro concepts?

Desired Participant Outcomes:

  1. Gain a better understanding of what micro and nanotechnology (MNT) are.
  2. Understand what the immediate and long term future holds for US industry in MNT
  3. Learn to “jazz” our students to pursueing a career in these and related emerging technologies.
  4. Understand micro nano skills/knowledge requirements
  5. How to integrate MNT concepts into traditional STEM classess.
  6. Find out where you can get help and the tools to integrate micro nano materials in your curriculum.
    1. Our ATE Centers are continuously looking for partners to disseminate and to contribute.
    2. Find out where to get (free) materials:
      1. Simulations, streaming lectures and videos
      2. Hands on kits for the classroom
      3. Written materials including instructor and student guides, PowerPoints and activities.
      4. Designing in the micro world - adding micro to CAD
  7. Learn best practices on integrating new, emerging technologies into the classroom and your program.
  8. Plan for the future - the evolution of traditional programs into emerging technology programs.
  9. Learn the "do's and don'ts" - best practices from the experts on micro-nano curriculum integration.
  10. Network with others from across the country - a chance to exchange and find solutions to common problems.

Application Process

  • You were most likely directed to this web site by invitation from one of the ATE Center partners.
  • Conference fee ($550) waivers and/or travel scholarships are available to qualified faculty from each of the sponsors.

There are only a limited number of scholarships - so apply early!

The application deadline is March 7th, 2011

Acceptance letters will go out March 14th, 2011

Application Link is now closed

For more information, contact This email address is being protected from spambots. You need JavaScript enabled to view it.

If you have trouble with viewing this website - feel free to contact the Web Meister - This email address is being protected from spambots. You need JavaScript enabled to view it., PI - SCME

Program at a glance

Note: There are several workshop/session slots available for you to share your materials.  Let us know if you would like to contribute with a presentation and/or hands-on activity.

DAY 1 - May 9th, 2011

All Events Prior to the Tours on Day 1 are in the Rotunda - Located in the Rotunda Building, 801 University
Registration/Sign In Opens
Opening Welcome - Conference Mission - Why MNT?

What is NSF's ATE Mission? - Dr. Gerhard Salinger, Program Director ATE and DR K-12
Centers Introduction - Who We Are
  1. SCME - Matthias Pleil
  2. MATEC - Michael Lesiecki
  3. NACK - Robert Ehrmann
  4. Nano-Link - Deborah Newberry
  5. NEATEC - Abraham Michelen


Industry Presentations I
Cutting edge industries will present on what they do, their technology, what does the future look like for their industry and, what they expect of the technicians they hire.
  • Jeb Flemming - Life BioScience Inc.
  • David Arney 3M
  • Ed Spivak - NM Optics Industry Assoc.
  • John Krieg - Plextronics

Industry Presentation II

  • Terrry Sullivan - HT Micro, MEMPro Ceramics, Albuquerque Econ. Dev.
  • Ray Tsui - Raydis LLC
  • Joe Ward - RJA Dispersions
  • Paul Behrendsen - Senda Microtechnologies
Lunch and Networking
Industry Panel
Panel discussion with Q&A from the Audience
Panelists: Paul Behrendsen, Jeb Flemming, Ed Spivak, Terry Sullivan, Ray Tsui
Travel to Various Tours

Sandia National Laboratories/Los Alamos National Laboratories Center for Integrated Nanotechnologies (CINT) - see where researchers synthesize and characterize nanostructured materials. Limit 20 participants.

Sandia National Laboratories MicroFabrication Facility (MESA) - a world-class fabrication facility dedicated to providing development and engineering capabilities for MEMS and radiation-hardended CMOS. Limit 20 participants.

N.M. Museum of Natural History and Science - See "Startup", the first museum exhibit dedicated to the microcomputer.

Bus 1, 2, 3 Travel from tour sites to Dinner and Keynote
Dinner at the National Museum of Nuclear Science and History
Dr. Neal Shinn - Center for Integrated Nanotechnology
Tour of the National Museum of Nuclear Science and History
Travel back to Hotel


DAY 2 - May 10th, 2011

Click on the session title to jump to the description

  Rotunda Building - 801 University MTTC Building - Next to Rotunda Building - 800 Bradbury
Time Rotunda Auditorium Class Rm 158 Class Rm 160

Computer Lab (Across from Rm 160)

      Open Lab
8:00 Advanced Technology Education for Micro- and Nanotechnologies



Lithography in a Box:

Micro Fluidics
 Forces and Interactions Polymers-Structure and Properties  NanoDays NISENet Activities for CC Classrooms
9:30 Rotate

Lithography in a Box:

Micro Fluidics

Self Assembly Forces and Interactions Polymers-Structure and Properties NanoDays NISENet Activities for CC Classrooms
10:05 Rotate
10:10 Lithography in a Box: Micro Fluidics Self Assembly Forces and Interactions Polymers-Structure and Properties NanoDays NISENet Activities for CC Classrooms
10:40 Rotate
10:45 Lithography in a Box Micro Fluidics Self Assembly Forces and Interactions Polymers-Structure and Properties NanoDays NISENet Activities for CC Classrooms
11:15 Move to the Rotunda      
11:20 All meet in the Rotunda for Wrap-up      

Lunch in the Rotunda


Group I

Remote Access to Nano Equipment Utilizing Hands-on Labs for the Science and Technology Classroom

Group II

A Nano Integration Program Success Story: Show me the program & Show Me the Benefits

1:40 Rotate 

Group II

Remote Access to Nano Equipment Utilizing Hands-on Labs for the Science and Technology Classroom

Group I

A Nano Integration Program Success Story: Show me the program & Show Me the Benefits

3:00 Break
3:15 Forum
17:00 Adjourn - Dinner on your own!
18:00-21:00 Executive Centers Team - Integration Forum Wrap up Meeting at the Church Street Cafe


DAY 3 - May 11th, 2011

Time Rotunda Auditorium Class Rm 158 Class Rm 160 Computer Lab (Across from Rm 160)
  Rotunda Building - 801 University MTTC Building - 800 Bradbury, Next to Rotunda Buidling
7:30  Coffee and Report out - Forum Summary and Discussion      
9:00 SCME Kit Overview        

Go to your first SCME session

9:30 Pressure Sensor Process

What are MEMS?

MEMS Overview & History

Making Micro Machines Kit

Online Resources and th Synergy Project


BioMEMS Overview  
10:25 Move to your next chosen sesion        
10:30 Pressure Sensor Model Kit MEMS Components - Transducers and Micropumps  

DNA microArrays

GeneChip Model

MEMS Design
11:25 Transition to Lunch        
Networking Lunch, Wrap up and Educational Materials Showcase
13:00-16:00 Executive Team Wrap Up Meeting - Lessons Learned - Next Conference Location


Panel of Alumni from Micro and Nanotechnology Programs
Undergraduate micro and nanotechnology programs have been in existence for over ten years.  Learn what kinds of jobs are available to graduates from these emerging technology programs.  What types of skills are required for micro nanotechnologists?  What kinds of career paths are available to these graduates?  A panel discussion of alumni from these new programs will share their success stories and discuss their career paths in both industry and transfer programs to further their education.
Facilitators:  Dr. Karen Halvorson, Coordinator of NACK Alumni Network and Ramie Chackan, NACK Alumni Network Career Services, DCTC.

Students include 1) TJ Ross, graduate of SCME supported program at Central New Mexico Community College and now contributing to Sandia National Laboratories' MEMS fabrication MESA facility; 2) Brandon Harris, graduate of Penn College of Technology and works at Fairchild Semiconductor and working on a BS in Chemistry, and 3) John Butenhoff, graduate of Dakota County Technical College's Nanoscience program.

Micro-Nanotechnology Forum Description

The Micro Nano Forum will give conference participants the opportunity to discuss issues, questions – and share solutions – for the problems that often surround high technology educational content and initiatives.  Using a round table, brainstorming method we will cover topics such as 1) Working with industry 2) Getting and keeping students, 3)Getting and keeping Administration on your side, 4) Involving faculty from other divisions and 5) Knowing and getting the necessary facilities.
On Tuesday we will work through specific questions and issues to define the scope of interest and particular areas of concern.  Wednesday we will have a chance in a group environment to share solutions or various approaches that have been successful.. All of the input from this forum will be captured and distributed to Conference participants.


Workshop and Session Descriptions!

Advanced Technology Education for Micro- and Nanotechnologies

This “must attend” opening session will introduce attendees to the collaborative of NSF funded centers that support learning and education in the micro- and nanotechnologies. Conference Chair Matt Pleil will moderate the interactive session that will describe the wealth of resources now available to educators and industry members. Your takeaway will be direct knowledge and “how to” access the classroom, individual learning and professional development resources. This session will give you a broad overview of these many resources that are available to you, a sampling of which you will see during the remainder of the conference sessions.

Nano-Link Center Workshop Block Description

A major focus of the Nano-Link Center is to create complete, topical modularized content.  The content of each module may vary but will include presentation charts, background information, activities, demos and experiments, questions, and animations, videos or simulations as applicable.  This series of workshops (30 minutes each) allows participants to rotate through in smaller groups and get hands-on experience with the experiments associated with some of these educational modules.  In many cases we have taken inexpensive, simple materials and activities and given them the depth of nanoscience content.  The topics covered at this conference range from the study of polymer structure and how it influences properties to crystal growth and structure to the practice of 2 lithography techniques.  Participants will receive a passcode to download all content from the Nano-Link website.

  • Lithography in a Box Micro Fluidics
  • Crystals - Self Assembly
  • Forces and Interactions Polymers-Structure and Properties
  • NanoDays NISENet Activities for CC Classrooms

NACK Center Workshop Block Description

Remote Access to Nano Equipment Utilizing Hands-on Labs for the Science and Technology Classroom

Remote Access to nano-characterization tools allows students and educators to gain teacher-led and individual “hands-on” experience with high tech equipment that would otherwise be unavailable at most institutions across the US.   NACK offers such an innovative learning experience by providing remote access to multiple nano-characterization tools (such as FESEM and AFM) within their cleanroom located at Penn State University.  This service is provided at no cost to the user, and also makes it possible for remote users to characterize their own samples.   Bring hands-on experience with state of the art equipment into your classroom.

A Nano Integration Program Success Story: Show me the Program and Show me  the Benefits

Do you want to make the case for building a nanotechnology program into your curriculum?   What are the potential benefits to the students?  What are the potential benefits to your department?   What are the potential benefits to your institution?  Learn how one Pennsylvania institution has utilized the integration of a nanotechnology program to achieve substantial rewards in all of these areas.

SCME Workshop Block Description

An overview of Microelectromechanical Systems, also know as microsystems.  Topics include Applications, History and Fabrication.  Participants will receive acess to materials developed by the SCME to use in their classrooms.  These learning modules can be used to motivate your students to study STEM topics and include a variety of microsystems-based of activities.

This Silicon Run Productions film "Making Micro Machines" will also be showcased.  This film reviews three major applications of MEMS and how these devices are made.  Learn how ink-jet print heads are made at HP, how the DLP (Digital Light Processor) DMD (Digital Mirror Device) works and is made at TI, and finally, how an engineering staff meets the needs of its customers at Freescale.  Along with the film, the SCME has developed educational materals to enable the educator to more effectively use this film as a teaching tool.

SCME Hands-on Kits

Participants will be presented with an overview of the kit offerings from the Southwest Center for Microsystems Education.  These include hands-on kits which enable STEM faculty to bring microsystems fabrication and applications to the classroom. Kits include: Crystallography, the Rainbow Wafer, Macro Pressure Sensor Model, Micro Pressure Sensor integration Kit, DNA Micro Array Model, Cantilever, Anisotropic Etch, Liftoff, and the Making Micro Machines DVD.  Participants will have the opportunity to interact with each kit and ask questions in this morning workshop.

MEMS Design


This session will present on SUMMiT V, an Auto CAD-based surface micro machining design technology developed by Sandia National Laboratories.  Participants will be presented with an overview of the technology and will be able to interact with the software.  You will design a micro cantilever, apply the visualization tools which include cross-sectional view and 3D analysis capabilities.  A description of  Sandia National Laboratories'  MEMS Design Competition and software will also be given.  For those with Auto CAD capabilities at their institutions, this is a great add-on to bring the students to the world micro nano technologies.

Pressure Sensor Macro Model - SCME

The Wheatstone Bridge is one of the most widely used circuits in sensor technology; this circuit allows one to take environmental information (pressure) and convert it into an electrical signal (voltage). You will learn the theory behind how these work as well as a method to build a macro model of a micro pressure sensor using common materials.   Kits include instructor and participant (student) learning modules, and links to our website which contains these materials plus PowerPoints and a How To video you can use in the classroom. Several additional activities are included in the learning module for the students to analyze their final Wheatstone Bridge Pressure Sensor Model.

Pressure Sensor Process

This workshop gives the participant an understanding of how a basic pressure sensor (transducer) is fabricated.  We will go through the process process steps used to make the SCME's pressure sensor transducers.  Both surface and bulk micro machining process examples are presented as well as our Pressure Sensor Process Kit.

Online Resources and the Synergy Project

SCME has been developing a wide variety of educational materials and professional development resources over several years.  See how we are moving forward by leveraging NSF's sponsored Synergy project.

BioMEMS Overview

BioMEMS represents the fastest growing segment of the MEMS (Micro Electro Mechanical Systems) market.  This workshop will give you an overview of some of the applications of MEMS focussing on biomedical applications.

MEMS Components - Transducers and Micropumps

This is an overview of transducers highlighting the application to micro pumps.

DNA microArrays - GeneChip Model

DNA microArrays enable the identification of specific genes, mutations.  This workshop will give the participant an overview and showcase our latest kit - the GeneChip Model kit.

Center Online Resources

During the Open Computer Lab sessions, you can drop in any time and take a self guided tour of any of our partner centers.  There will be staff assisting you so you can get registered to gain access to a plethora of downloadable educational materials.

MATEC Networks Online Resources

Explore and become a member of the MATEC Networks family!  This is a guided tour of MATEC Networks - see online educational materials and archived webinars covering a wide range of topics.

Nano4Me.org - NACK

Interested in integrated nano materials and creating your own nano course?  NACK and it's Nano4Me site offers a large varitey of resources answering questions such as "Where are  the jobs?", "Where are the programs?" "What is Nanotech?" as well as a rich set of downloadable classroom instruction materials for undergraduate STEM classes.


Learn the offerings of Nano-Link; download Newberry's presentations and find other nano educational partners through this web site!
The SCME is developing unique customizable online reseources for our users.  Choose among dozens of learning modules and request your own online course where you, as the teacher, can enroll your students for a unit (learning module), a short course or even a full blown course on MEMS and related topics.  Also receive an overview of the offering on the SCME-NM.org website including where to find downloadable materials: Instructor Guides, Participant (Student) Guides, streaming lectures, industry links, upcoming events, and the teacher forums.

If you have trouble viewing this website - feel free to contact the Web Meister - This email address is being protected from spambots. You need JavaScript enabled to view it., PI - SCME



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