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Dr. Pleil with Student at the MTTC
Teaching students about Microsystems Fabrication
Barbara Lopez at the MTTC
Teaching students the importance of safety in the clean room
Mathew, Olivia and Andy
Developing the chamber (backside) pressure sensor pattern
Olivia in the MTTC
Olivia is an EET student from Ivy Tech learning about MEMS fabrication
March Reactive Ion Etcher
Etching the Silicon Nitride hard mask
Rick and Andy using the March RIE
Rick and Andy etching the backside chamber mask pattern into the silicon nitride hard mask.
Rick using the |dq|AAA|dq| rule
Rick from Rio Salado learning how to fabricate a MEMS Pressure Sensor at UNM's MTTC cleanroom
SCME PS Workshop
Team Work during the SCME 8/2015 PS Workshop
Metal Evaporation
SCME Workshop - Cr/Au evaporation

Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  pdf  A brief history of the term Micro Electro Mechanical Systems (MEMS)

See a map of who's downloading (last updated 7/11/16)


North Dakota Rocks!

From Matt's Desk

As you may or should know, NDSCS Rocks!  North Dakota State College of Science is the only one of our many partners has made the leap to teaching the SCME 4 day Pressure Sensor Cleanroom Workshop outside of New Mexico's UNM MTTC.  WOW!  They did great - here are some quotes from the participants:

  1. I expected to learn some great information, but I did not expect to leave with a general understanding of the entire process. I can hardly wait to tell people about what I experienced.
  2. I learned some of the concepts behind nano techniques. This can be taken back to my classroom to add real-life applications for theories we already teach.
  3. Instructors are extremely clear in their explanations. There is a great mix of lab supported by materials and lecture. Instructors are extremely knowledgeable and competent. There is a great mix of the disciplines all coming together to teach the concepts.
  4. I am now familiar with SCME and many of the kit contents.
  5. The information was thorough, the instruction was very personal and outstanding. I will be in contact in the future with these instructors to discuss ways to bring these concepts to all grade levels and content areas.

And when asked if, when and where they would use the materials:

  1. I am currently doing outreach, but I plan to use my kit to explain the general process to others.
  2. Lift-off kit for introductory chem lab.
  3. I will use the crystallography in earth science and the sensor activities in advanced biology.
  4. Pressure Sensor Model Activity Kit (#9). I will use this with the Society of Physics Students group (about 15 students).
  5. Chemistry concepts, manufacturing processes and basics of nanotechnology application.

This is really awesome for a first timer!


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