Dr. Pleil with Student at the MTTC
Teaching students about Microsystems Fabrication
Barbara Lopez at the MTTC
Teaching students the importance of safety in the clean room
Mathew, Olivia and Andy
Developing the chamber (backside) pressure sensor pattern
Olivia in the MTTC
Olivia is an EET student from Ivy Tech learning about MEMS fabrication
March Reactive Ion Etcher
Etching the Silicon Nitride hard mask
Rick and Andy using the March RIE
Rick and Andy etching the backside chamber mask pattern into the silicon nitride hard mask.
Rick using the "AAA" rule
Rick from Rio Salado learning how to fabricate a MEMS Pressure Sensor at UNM's MTTC cleanroom
SCME PS Workshop
Team Work during the SCME 8/2015 PS Workshop
Metal Evaporation
SCME Workshop - Cr/Au evaporation

Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  A brief history of the term Micro Electro Mechanical Systems (MEMS)

See a map of who's downloading (last updated 7/11/16)

 

The Southwest Center for Microsystems now has 11 kits available for purchase!

Check out the Kit Descriptions and link to our Storefront to order yours today! 

Feel free to contact us directly if you have any questions and wish to learn more!

 

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