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Dr. Pleil with Student at the MTTC
Teaching students about Microsystems Fabrication
Barbara Lopez at the MTTC
Teaching students the importance of safety in the clean room
Mathew, Olivia and Andy
Developing the chamber (backside) pressure sensor pattern
Olivia in the MTTC
Olivia is an EET student from Ivy Tech learning about MEMS fabrication
March Reactive Ion Etcher
Etching the Silicon Nitride hard mask
Rick and Andy using the March RIE
Rick and Andy etching the backside chamber mask pattern into the silicon nitride hard mask.
Rick using the |dq|AAA|dq| rule
Rick from Rio Salado learning how to fabricate a MEMS Pressure Sensor at UNM's MTTC cleanroom
SCME PS Workshop
Team Work during the SCME 8/2015 PS Workshop
Metal Evaporation
SCME Workshop - Cr/Au evaporation

Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  pdf  A brief history of the term Micro Electro Mechanical Systems (MEMS)

See a map of who's downloading (last updated 7/11/16)


Crystallography Applied to MEMS - Oklahoma Career Tech Conference



Crystallography Workshop - Oklahoma 2012 Career Tech - Summer Conference - STEM Division Friday, August 3

Presentor: Matthias W. Pleil, SCME PI

This workshop will provide you, the STEM educator, with a hands-on approach to teaching crystallorgraphy and you will be equipped to teach how it applies to the making of your students' hign tech electronic gadgets and a future career in the Microsystems industry!  Each participant will interact with three classroom activities and be provided with a set of materials and resources including instrutor and student guides, animations and hands-on classroom materials.  You and your student will never look at a crystal in the same way!

Participants are encouraged to create an account on the SCME website and log in to get access to all our instructor educational materials.

Workshop Presentations:

SCME - Who we are and What we do!

Crystallography Overview

Learning Module:

Crystallography Overview Participant Guide


SCME YouTube Channel

OK 2012 Conference Link


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