ATMAE 2012 - SCME Presentations

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ATMAE 2012 - SCME Presentations

Dr. Pleil with Student at the MTTC

Teaching students about Microsystems Fabrication

Barbara Lopez at the MTTC

Teaching students the importance of safety in the clean room

Mathew, Olivia and Andy

Developing the chamber (backside) pressure sensor pattern

Olivia in the MTTC

Olivia is an EET student from Ivy Tech learning about MEMS fabrication

March Reactive Ion Etcher

Etching the Silicon Nitride hard mask

Rick and Andy using the March RIE

Rick and Andy etching the backside chamber mask pattern into the silicon nitride hard mask.

Rick using the |dq|AAA|dq| rule

Rick from Rio Salado learning how to fabricate a MEMS Pressure Sensor at UNM's MTTC cleanroom

SCME PS Workshop

Team Work during the SCME 8/2015 PS Workshop

Metal Evaporation

SCME Workshop - Cr/Au evaporation

Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here: pdf A brief history of the term Micro Electro Mechanical Systems (MEMS)

See a map of who's downloading (last updated 7/11/16)

ATMAE 2012 - SCME Presentations

Created: 15 November 2012 | Last Updated: 16 November 2012 | Published: 16 November 2012 | Written by Matthias Pleil | Print | Email | Hits: 5507

ATMAE Conference - A Success!

Click to get: Presentations for Download

Check out the ATMAE Website

Session I

What are MEMS and Why a 2yr Tech Program Should Care?

Session II

How are MEMS Made? The Pressure Sensor Process Kit and Understanding Microfabrication Processes in the Classroom.

The SCME Pressure Sensor Process Kit - Understanding Microfabrication Processes in the Classroom

Session III

Building a Micro Pressure Sensor in the STEM Classroom

Wheatstone Bridge Overview - Applied Approach!

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