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Dr. Pleil with Student at the MTTC
Teaching students about Microsystems Fabrication
Barbara Lopez at the MTTC
Teaching students the importance of safety in the clean room
Mathew, Olivia and Andy
Developing the chamber (backside) pressure sensor pattern
Olivia in the MTTC
Olivia is an EET student from Ivy Tech learning about MEMS fabrication
March Reactive Ion Etcher
Etching the Silicon Nitride hard mask
Rick and Andy using the March RIE
Rick and Andy etching the backside chamber mask pattern into the silicon nitride hard mask.
Rick using the |dq|AAA|dq| rule
Rick from Rio Salado learning how to fabricate a MEMS Pressure Sensor at UNM's MTTC cleanroom
SCME PS Workshop
Team Work during the SCME 8/2015 PS Workshop
Metal Evaporation
SCME Workshop - Cr/Au evaporation

Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  pdf  A brief history of the term Micro Electro Mechanical Systems (MEMS)

See a map of who's downloading (last updated 7/11/16)

 

ATMAE 2012 - SCME Presentations

ATMAE Conference - A Success!

Click to get: Presentations for Download

Check out the ATMAE Website

Session I

What are MEMS and Why a 2yr Tech Program Should Care?

Session II

How are MEMS Made? The Pressure Sensor Process Kit and Understanding Microfabrication Processes in the Classroom.

The SCME Pressure Sensor Process Kit - Understanding Microfabrication Processes in the Classroom

Session III

Building a Micro Pressure Sensor in the STEM Classroom

Wheatstone Bridge Overview - Applied Approach!

Make sure you explore the Educational Materials to download the corresponding learning modules.  If you create an account - you will also have access to educator materials including learning module instructor guides, and powerpoint files.  

Check out our SCME YouTube channel as well!

 

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