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July 2013

4-day SCME Pressure Sensor Cleanroom Workshop


The University of Michigan's Lurie Nanofabrication Facility

in collaboration with

The Southwest Center for Microsystems Education

This workshop at UM LNF is by invitation only

Workshop Description

The purpose of this workshop is to provide an opportunity to learn how to integrate Microsystems Technology into STEM curriculum.  You will learn how to use select SCME’s kits in the classroom and be provided hands-on experience on the process steps for fabricating a MEMS micro-pressure sensor at the University of Michigan's Lurie Nanofabrication Facility (LNF) in Ann Arbor Michigan.  The SCME is sponsoring this event and has completed the technology transfer to LNF.  The SCME has now established the pressure sensor workshop at four locations across the nation, University of New Mexico's MTTC, North Dakota State College of Science's CNTT, USF's NREC, and now UM's LNF.

Click here for the USF Pressure Sensor Workshop Agenda
Each participant will actively complete and be trained on the following six SCME kits:
Crystallography, Rainbow Wafer, Pressure Sensor Model, Lift-off, Pressure Sensor Process, MEMS: Making Micro Machines.   These kits will allow the participants to bring this cleanroom experience to the classroom.

Direct Links to the learning modules, italicized components indicate kits. 

To see a complete set of these Learning Modules - create an account on this website - login and go to the Educational Materials link.  Logging in allows you to access not only the student (participant) materials but also the instructor guides, presentations and the like.  One item of note is the: Pressure Sensor Fabrication Module.  Others include:

Click on our YouTube Chanel link!  There are animations/videos explaining many of the concepts you will learn in this workshop.

You may wish to veiw additional, detailed information on all our kits, click on:  Kit Listing

If you have questions, contact Anna Garden: This email address is being protected from spambots. You need JavaScript enabled to view it. and/or This email address is being protected from spambots. You need JavaScript enabled to view it.





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