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Dr. Pleil with Student at the MTTC
Teaching students about Microsystems Fabrication
Barbara Lopez at the MTTC
Teaching students the importance of safety in the clean room
Mathew, Olivia and Andy
Developing the chamber (backside) pressure sensor pattern
Olivia in the MTTC
Olivia is an EET student from Ivy Tech learning about MEMS fabrication
March Reactive Ion Etcher
Etching the Silicon Nitride hard mask
Rick and Andy using the March RIE
Rick and Andy etching the backside chamber mask pattern into the silicon nitride hard mask.
Rick using the |dq|AAA|dq| rule
Rick from Rio Salado learning how to fabricate a MEMS Pressure Sensor at UNM's MTTC cleanroom
SCME PS Workshop
Team Work during the SCME 8/2015 PS Workshop
Metal Evaporation
SCME Workshop - Cr/Au evaporation

Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  pdf  A brief history of the term Micro Electro Mechanical Systems (MEMS)

See a map of who's downloading (last updated 7/11/16)

 

Northwest Vista Comes to SCME

Northwest Vista College has a 2-year Associates in Applied Science Nano Tech program.  Qiaoying (Joy) Zhou is the program coordinator and one of the primary instructors.  Read about her program, comments from her students on their experience in the Pressure Sensor workshop and watch her on the news!

Read more: Northwest Vista Comes to SCME

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