Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  A brief history of the term Micro Electro Mechanical Systems (MEMS)

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Surface Micromachining: Lift-Off Activity files

The Surface Micromachining - Liftoff Process Kit and Activity is part of the MTTC Micro Pressure Sensor Process Learning Module.  In this activity participants perform and observe the lift-off process that is used to form the Wheatstone bridge for the MTTC pressure sensor.  The lift-off process is one of the ten (10) steps of the MTTC process for fabricating a micro pressure sensor.

This kit does require the use of acetone; therefore, all chemical safety rules must be applied.  Participants are required to study the Material Safety Data Sheet for acetone prior to completing this activity.

The kit contains seven (7) chips pre-deposited with chrome and gold and patterned for a Wheatstone bridge circuit.  It also contains a chip holder and process flask.  The instructor is required to supply the acetone.

To order this kit, please go to our kit store.


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