News Flash: Check out: MEMS based energy harvesters transform waste into electricity! Here is another cantilever based MEMS device! Oak Ridge is developing a way to harvest 10-30% of wasted heat back into electricity with Cantilever Arrays!
Pressure Sensor Process Activity
The Pressure Sensor Process kit and activity is part of the MTTC Pressure Sensor Process Learning Module.Â In this activity participants apply their knowledge of a specific MEMS pressure sensor fabrication process.Â The kit consists of several small boxes with each box containing a "chip" that represents the outcome of one step of a ten (10) step pressure sensor process.Â The process is covered in the Learning Module.Â Participants are asked to study each chip and then arrange the ten chips in the correct process order.Â For example, the first chip would be bare silicon and the last chip would be a finished pressure sensor.
This kit can be used as an inquiry activity to get the participants interested in the process, and then completed again to demonstrate their understanding of the process once they have studied it.Â To review the activity open a the MTTC Pressure Sensor Process Learning Module and go to the "Pressure Sensor Process Acitvity".
To order this kit, please complete the SCME Kit Order Form.
This is the Participant Guide (Student Guide) for the Pressure Sensor Process Activity. The SCME Pressure Sensor Process Kit is required to complete this activity.