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Micro Pressure Sensor Process Activity
The Micro Pressure Sensor Process kit and activity is part of the MTTC Micro Pressure Sensor Process Learning Module. In this activity participants apply their knowledge of a specific MEMS pressure sensor fabrication process. The kit consists of several small boxes with each box containing a "chip" that represents the outcome of one step of a ten (10) step pressure sensor process. The process is covered in the Learning Module. Participants are asked to study each chip and then arrange the ten chips in the correct process order. For example, the first chip would be bare silicon and the last chip would be a finished pressure sensor.
This kit can be used as an inquiry activity to get the participants interested in the process, and then completed again to demonstrate their understanding of the process once they have studied it. To review the activity open a the MTTC Micro Pressure Sensor Process Learning Module and go to the "Micro Pressure Sensor Process Activity".
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This is the Participant Guide (Student Guide) for the Pressure Sensor Process Activity. The SCME Pressure Sensor Process Kit is required to complete this activity.