Kits for the Classroom

This category contains information about the SCME kits that are available to instructors who are planning to incorporate MEMS Technology into their classroom and are looking for exciting, thought-provoking activities.

  1. Bulk Micromachining - An Etch Process Activity and Kit (formerly Anisotropic Etch)
  2. Crystallography Activities and Kits
  3. DNA Microarray Model Activity and Kit (formerly GeneChip Model)
  4. Microcantilever Model Activity and Kit (formerly Dynamic Cantilever)
  5. Surface Micromachining-Lift-Off Activity and Kit (formerly Lift-off Kit)
  6. LIGA Micromachining -Lithography & Electroplating Activities and Kit
  7. MEMS: Making Micro Machines DVD Kit
  8. Learning Microsystems through Problem Solving Activity and Kit (formerly MEMS Innovators)
  9. Modeling a Micro Pressure Sensor Activity Kit (formerly Pressure Sensor Model Kit)
  10. Micro Pressure Sensor Process Activity and Kit
  11. Science of Thin Films Activity and Kit (formerly Rainbow Wafer)

To order a kit using a credit card, visit the Kit Store.

To order a kit using a Purchase Order, contact Anna Garden (agarden@unm.edu).

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Categories

Pressure Sensor Model Activity and Kit

Pressure Sensor Model Activity and Kit ( 1 Files )

The Modeling a Micro Pressure Sensor Activity and Kit is part of the Micro Pressure Sensors and the Wheatstone Bridge Learning Module.  In this activity participants build a macro-size pressure sensor model that uses a Wheatstone bridge as the sensing circuit. The operation and analysis of the model is similar to that of a micro pressure sensor.  After building the model students observe and analyze the effects that pressure has on the diaphragm and Wheatstone bridge circuit, as well as create calibration curves for their particular sensor.

The kit provides the majority of supplies needed to build this model.  However, the instructor will have to supply a few things.  To see a list of the kit items and the items that need to be provide by the instructor, go to the Micro Pressure Sensors and the Wheatstone Bridge Learning Module, and then scroll down to the Modeling a Micro Pressure Sensor Activity.  To access the Instructor Guide and the supporting presentations for this activity and learning module, you must be a registered user of this site.

To order this kit, please go to our kit store.

MEMS:  Making Micro Machines DVD Kit

MEMS: Making Micro Machines DVD Kit ( 0 Files )

This folder contains the guides for the MEMS: Making Micro Machines Learning Module and Kit. The Participant Guide is available to everyone.  However, you must be a registered user of this site to access the Instructor Guide.  The learning module consists of three (3) activities and two assessments that support the film "MEMS:  Making Micro Machines".  This film presents several applications of MEMS as well as MEMS fabrication and design. It was produced and directed by Ruth Carranza of Silicon Run Production.

The MEMS: Making Micro Machine DVD Kit contains a DVD of the film and copies of the MEMS: Making Micro Machines Learning Module. The Participant Guide in this folder is available to everyone. The Instructor Guide is available to registered users of this site.

To order this kit, please go to our kit store.

Microcantilever Activity and Kit

Microcantilever Activity and Kit ( 0 Files )

The Microcantilever kit and activity are part of the Microcantilever Learning Module.  This activity provides participants an opportunity to explore the motion of a dynamic cantilever under a varying mass and various dimensions, and to determine the relationship that expresses the resonant frequency of a cantilever as a function of mass or size.  This activity simulates the dynamic mode of operation for microcantilevers used in MEMS sensors.

For this activity, participants are required to produce a Lab Report that contains the data collected, graphs showing the relationship of two variables,  observations and results.

The Microcantilever Kit contains cantilevers of different widths, thicknesses and materials.  Clamps for mounting the cantilevers to a table and "mass" objects are also included in the kit.  The Microcantilever activity can be found in the Microcantilever Learning Module (Book 2).  The learning module Participant Guide is available to everyone.  However, to access the Instructor Guide and related PowerPoint presentations, you must be a registered user of this site.

To further explore the operation of cantilever and how cantilevers are used in microtechnology, instructors and participants should study the materials provided in the complete Microcantilever Learning Module.  This module provides information on MEMS cantilevers applications, how a cantilever works, and chemical sensor arrays (micro-size devices that use microcantilevers to sense a variety of chemicals, gases, orders, etc.).

To order this kit, please go to our kit store

Crystallography Activities and Kit

Crystallography Activities and Kit ( 0 Files )

The Crystallography Kit and activities are part of the Crystallography Overview Learning Module.  There are two activities:

  1. Breaking Wafers
  2. Origami Crystal

These activities allow participants to explore the crystal structure of silicon and crystal planes as defined by Miller's indices.  The Crystallography Kit contains two types of silicon wafers (wafers with two different crystal orientations) that are needed by the "Breaking Wafers Activity".  The kit also contain 12 origami templates that are needed for the "Origami Crystal Activity".  The template can also be downloaded using an URL provided in the activity.

The Crystallography Overview Learning Module also contains a third activity that allows participants to demonstrate their understanding of the Miller Index.  This activity require three straight edges (such a rulers or yard sticks) and a rectangular piece of cardboard.  The Learning Moduel Participant is available to everyone.  However, to access the Instructor Guide and related PowerPoint, you must be a registered user of this site.

To order this kit, please go to our kit store.

Micro Pressure Sensor Process Activity and Kit

Micro Pressure Sensor Process Activity and Kit ( 1 Files )

The Micro Pressure Sensor Process kit and activity is part of the MTTC Micro Pressure Sensor Process Learning Module.  In this activity participants apply their knowledge of a specific MEMS pressure sensor fabrication process.  The kit consists of several small boxes with each box containing a "chip" that represents the outcome of one step of a ten (10) step pressure sensor process. The process is covered in the Learning Module.  Participants are asked to study each chip and then arrange the ten chips in the correct process order.  For example, the first chip would be bare silicon and the last chip would be a finished pressure sensor.

This kit can be used as an inquiry activity to get the participants interested in the process, and then completed again to demonstrate their understanding of the process once they have studied it.  To review the activity open a the MTTC Micro Pressure Sensor Process Learning Module and go to the "Micro Pressure Sensor Process Activity".

To order this kit, please go to our kit store.

Bulk Micromachining Activity and Kit

Bulk Micromachining Activity and Kit ( 0 Files )

The Bulk Micromachining - An Etch Process Kit and Activity is part of the Etch Overview for Microsystems Learning Module and the MTTC Micro Pressure Sensor Process Learning Module.  In this activity participants perform and observe an anisotropic etch process using a chip that has been patterned with silicon nitride to identify the areas to be etched.  This particular etch process is used to form a cavity on the backside of a silicon wafer.  This cavity is the reference chamber for a MEMS pressure sensor.

Because of the chemical used for this process (sodium hydroxide), a fume hood and special personal protective equipment is required.  Participants are also required to study the Material Safety Data Sheet for sodium hydroxide prior to starting the activity.  All lab and chemical safety rules must be applied went completing this activity.

The kit contains seven (7) chips as well as a teflon chip holder.  It also contains a small scale for measuring the sodium hydroxide, and a 1 liter beaker for the process chemical.  Due to regulations concerning the shipping of hazardous materials, the instructor is required to supply the sodium hydroxide (heavy duty drain cleaner).

To order this kit, please go to our kit store.

Surface Micromachining Activity and Kit

Surface Micromachining Activity and Kit ( 0 Files )

The Surface Micromachining - Liftoff Process Kit and Activity is part of the MTTC Micro Pressure Sensor Process Learning Module.  In this activity participants perform and observe the lift-off process that is used to form the Wheatstone bridge for the MTTC pressure sensor.  The lift-off process is one of the ten (10) steps of the MTTC process for fabricating a micro pressure sensor.

This kit does require the use of acetone; therefore, all chemical safety rules must be applied.  Participants are required to study the Material Safety Data Sheet for acetone prior to completing this activity.

The kit contains seven (7) chips pre-deposited with chrome and gold and patterned for a Wheatstone bridge circuit.  It also contains a chip holder and process flask.  The instructor is required to supply the acetone.

To order this kit, please go to our kit store.

Science of Thin Films Activity and Kit

Science of Thin Films Activity and Kit ( 0 Files )

The Science of Thin Films Kit and activity is part of the Deposition Overview for Microsystems Learning Module.  The Science of Thin Films activity allows the participants to explore a few of the basic concepts of microfabrication - such as thermal oxidation, thin film interference, and silicon dioxide (oxide) etch.  Participants interpret oxidation graphs, estimate oxide thicknesses, and calculate etch rates.  They also observe how light affects the physical appearance of transparent thin films.

The kit contains two (2) rainbow wafers.  A rainbow wafer is an oxidized silicon wafer that has been etched using a manual process resulting in several layers of oxide of different thicknesses. To view the activity open the Deposition Overview for Microsystems Learning Module (Participant Guide available to everyone) and scrolled down to the Rainbow Wafer Activity.  The Deposition Overview for Microsystems Learning Module folder also contains a PowerPoint presentation for this activity as well as the Instructor Guide.  However, you must be a registered user to access these documents.

To order this kit, please go to our kit store.

DNA Microarray Model Kit

DNA Microarray Model Kit ( 0 Files )

The DNA Microarray Model kit and activity are part of the DNA Microarray Learning Module.  This activity provides participants an opportunity to explore the photolithography fabrication process used to build a GeneChip, a DNA microarray developed by Affymetrix.  Participants will "fabricate" a three oligonucleotide (oligo) 8 x 8 array.  The activity also provides the opportunity for participants to "hybridize" oligos to sample DNA sequences, and to determine the reliability of the DNA microarray test by interpreting the "hybridized" oligos.

The DNA Microarray Model Kit contains an array board, beads that represent DNA's four nucleotide bases, photolithography masks and test sample DNA "models".   The DNA Microarray Model activity can be found in the DNA Microarray Learning Module.  The learning module Participant Guide is available to everyone.  However, to access the Instructor Guide, related PowerPoint presentations and animations you must be a registered user of this site.

For more information on DNA microarrays, their applications, function and fabrication, instructors and participants should study the materials provided in the DNA Microarray Learning Module.

To order this kit, please go to our kit store.

Learning Microsstems Through Problem Solving Activity and Kit

Learning Microsstems Through Problem Solving Activity and Kit ( 3 Files )

This folder contains the guides for the Learning Microsystems Through Problem Solving Activity and kit, as well as related presentations. This activity can be used as an activity in the SCME Transducer, Sensors, and Actuator Learning Modules or as a capstone activity for a MEMS Introduction course or curriculum.  In order to get the most from this activity, participants should have a basic understanding of microsystems applications, components, and fabrication processes.  The presentations available in this folder include a review of each of these concepts: applications, components and process.

The Learning Microsystems Through Problem Solving activity engages the participants in a team project to design and develop a microsystems component that can be used in a specific application.  Each team builds a component using a variety of materials available in the kit.  During the development of the microsystems component, the teams are also required to discuss and develop a fabrication process for the component. The activity outcomes include a model of a micro component, an outline of the component's fabrication process, and a team presentation on its component.

The Particiapant Guide and Activity Checklist is available to everyone.  To access the Instructor Guide and other supporting materials, you must be a registered user.

To order this kit, please go to our kit store.


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