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History of MEMS
This category includes the History of MEMS Learning Module (Instructor guide, Participant guide and PowerPoint presentation).
The following SCME YouTube video can be used to support the concepts introduced in this learning module.
History of MEMS - An Introduction (49:17 minutes)
A brief history of the term Micro Electro Mechanical Systems (MEMS)
Professor, Mechanical Engineering University of New Mexico Albuquerque, NM
22 June 2016
History of MEMS Participant (Student) Guide - PDF
This learning module steps you through the history of microtechnology and introduces significant events, people and devices leading up to microtechnology as we know it today.
Latest Revision February 2013