Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  A brief history of the term Micro Electro Mechanical Systems (MEMS)

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Categories

Crystallography Overview for MEMS

Crystallography Overview for MEMS ( 1 Files )

This category contains the Crystallography Overview for MEMS Learning module.  This learning module covers the various types of solids, crystal structure, the crystal structure of silicon and why crystal orientation is important in microtechnology fabrication. It also covers the Miller Index and how it is used to identify crystal orientation of substrates used in the fabrication of micro-devices.

Instructors - make sure you are logged in for access to the Instructor Guide and presentation!

The following SCME YouTube video can be used to support the concepts and activities presented in this learning module.

(100) Crystal Plane of Silicon Animation (0:58 seconds)

Breaking Silicon Wafer Demo (2:21 minutes)

Miller Index Activity Demo (7:41)

Tutorial of 3D Viewer for Crystal Structures (7:29)

Silicon Crystal Origami (0:44 seconds)

Crystallography Activity Animations

Crystallography Activity Animations ( 1 Files )

Animations for the Crystallography Overview for MEMS Learning Module.

Deposition Overview for Microsystems

Deposition Overview for Microsystems ( 3 Files )

This category include the Deposition Overview for Microsystems Learning Module (Instructor guide, Participant guide and PowerPoint presentation).  This learning module provides an overview of the various deposition processes used to fabricate microsystems.  Such processes include thermal oxidation, chemical vapor deposition (CVD), and physical vapor deposition (PVD).

The Science of Thin Films Kit (formerly Rainbow Wafer Kit) supports this learning module by providing the participants the opportunity to further explore thin films through an in-depth study of the thin film - silicon dioxide.

The following SCME YouTube videos can be used to support the concepts and activities introduced in this learning module.

Deposition Overview - Part I  (12:53 minutes)

Deposition Overview - Part II (10:33)

Wet Thermal Oxidation Process Animation (1:11 minutes)

Dry Thermal Oxidation Process Animation (1:45 minutes)

Wet vs. Dry Oxidation Process Animation (2:01 minutes)

Photolithography Overview for MEMS

Photolithography Overview for MEMS ( 2 Files )

This category includes the Photolithography Overview for MEMS Learning Module (Instructor guide, Participant guide and PowerPoint presentation).  The steps of photolithography as well as an overview of the various processes are covered.

The following SCME YouTube video can be used to support the concepts introduced in this learning module.

Photolithography Overview for MEMS (12:03 minutes)

Etch Overview for Microsystems

Etch Overview for Microsystems ( 3 Files )

This category includes the Etch Overview for Microsystems Learning Module.  This learning module covers the various types of etch processes used in the fabrication of micro-sized devices or MEMS.  Such processes include chemical and physical etch, wet vs. dry etch, plasma etch, and RIE (reactive ion etch).

The following SCME YouTube videos can be used to support the concepts introduced in this learning module.

Etch Processes for Microsystems - Part 1 (15.26 minutes)

Etch Processes for Microsystems - Part II (14:55 minutes)

MTTC Pressure Sensor Process Process

MTTC Pressure Sensor Process Process ( 1 Files )

This category includes the MTTC Pressure Sensor Process Learning Module, a fabrication process for a MEMS Pressure Sensor developed by the Manufacturing Technology Training Center (MTTC) at the University of New Mexico (UNM).  Materials include Instructor guide, Participant guide and PowerPoint presentation.

There are three (3) kits available through SCME that support this learning module:

  • Micro Pressure Sensor Process Model Kit
  • Surface Micromachining - Lift-Off Process Kit (formerly Lift-off)
  • Bulk Micromachining - An Etch Process Kit (formerly Anisotropic Etch)

 

MEMS Micromachining Overview

MEMS Micromachining Overview ( 8 Files )

This category contains the MEMS Micromachining Overview Learning module (Instructor guide, Participant guide and PowerPoint presentation).  This learning modules provides an overview of the three more common processes used to fabricate microsystem devices:  bulk, surface and LIGA.

The following SCME YouTube videos can be used to support the various concepts introduced in this learning module.

Surface Micromachining Overview (9:16 minutes)

An Example of Surface Micromachining Animation (16 seconds)

Bulk Micromachining Overview (6:18 minutes)

An Example of Bulk Micromachining Animation (14 seconds)

LIGA Micromachining Overview (7:25 minutes)

LIGA Micromachining Process Animation (1:11 minutes)

 

 

LIGA Micromachining Activities and Presentation

LIGA Micromachining Activities and Presentation ( 1 Files )

This folder contain the activities module for LIGA Micromachining.  LIGA (LIthographie (Lithography), Galvanoformung (electroforming), and Abformung (molding)) is a microtechnology fabrication method that yields micro-sized components and devices with high aspect ratio (tall and narrow).  In LIGA fabrication x-rays generated by a synchroton are used to carve out deep patterns in a resist material.  These patterns are then electroplated to form the desired structure or used as molds for MEMS components.

The LIGA Micromachining module includes four activities that allow participants to explore micromachining fabrication:

  • LIGA Micromachining Research Activity
  • LIGA Micromachining - Lithography & Electroplating Activities - Parts I and II
  • LIGA Micromachining Terminology Activity

SCME provides a kit that supports the lithography and electroplating activities.  The kit contains most of the materials needed to simulate the lithography and electroforming steps of the LIGA process.  For a list of kit contents see LIGA Micromachining -Lithography & Electroplating Activities in the LIGA Micromachining Activities module.  A supporting PowerPoint presentation is also included in this category and can be downloaded by registered users.

These activities support the MEMS Micromachining Learning Module.  Instructors and participants should study the MEMS Micromachining Primary Knowledge unit prior to completing this activities module in order to gain a basic understanding of MEMS micromachining and the terminology associated with it.

To learn more about the LIGA Learning Module and activities, and to order the LIGA Micromachining -Lithography & Electroplating Kit, please visit the kit store LIGA Micromachining - Lithography & Electroplating Kit

The following SCME YouTube videos can be used to support the various concepts introduced in this learning module.

LIGA Micromachining Overview (7:25 minutes)

LIGA Micromachining Process Animation (1:11 minutes)

A Systematic Approach to Problem Solving

A Systematic Approach to Problem Solving ( 1 Files )

The category contains the SCME learning module - A Systematic Approach to Problem Solving.  This learning module guides the participants through a series of activities that allow them to analyze and develop a systematic approach to solving problems using creative thinking and quantitative tools used in a manufacturing environment.


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