Have you ever wondered where the term "MEMS" came from?
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This category contains the Crystallography Overview for MEMS Learning module. This learning module covers the various types of solids, crystal structure, the crystal structure of silicon and why crystal orientation is important in microtechnology fabrication. It also covers the Miller Index and how it is used to identify crystal orientation of substrates used in the fabrication of micro-devices.
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The following SCME YouTube video can be used to support the concepts and activities presented in this learning module.
(100) Crystal Plane of Silicon Animation (0:58 seconds)
Breaking Silicon Wafer Demo (2:21 minutes)
Miller Index Activity Demo (7:41)
Silicon Crystal Origami (0:44 seconds)
Crystallography Overview for MEMS Learning Module - Participant (Student) Guide
This learning module discusses the various types of solids, crystal structure and the importance of crystal structure to microtechnology fabrication. The learning module includes reading material, three (3) activities, and a pre-test to test your knowledge of crystallography prior to completing the learning module.
Latest revision January 2015 (Hot Ice AC added and Miller Index AC revised)