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MEMS Micromachining Overview Learning Module

This category contains the MEMS Micromachining Overview Learning module (Instructor guide, Participant guide and PowerPoint presentation).  This learning modules provides an overview of the three more common processes used to fabricate microsystem devices:  bulk, surface and LIGA.

The following SCME YouTube videos can be used to support the various concepts introduced in this learning module.

Surface Micromachining Overview (9:16 minutes)

An Example of Surface Micromachining Animation (16 seconds)

Bulk Micromachining Overview (6:18 minutes)

An Example of Bulk Micromachining Animation (14 seconds)

LIGA Micromachining Overview (7:25 minutes)

LIGA Micromachining Process Animation (1:11 minutes)

 

 

Documents

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MEMS Micromachining Narrated Presentation MEMS Micromachining Narrated Presentation

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Date added: 06/11/2012
Date modified: 06/11/2012
Filesize: 19 MB
Downloads: 585

This is a narrated presentation of the MEMS Micromachining Processes in the MP4 format.

MEMS Micromachining Narrated Presentation MEMS Micromachining Narrated Presentation

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Date added: 06/11/2012
Date modified: 06/11/2012
Filesize: 19 MB
Downloads: 1444

This is a narration version of the MEMS Micromachining Overview.  It is in a MP4 format.

MEMS Micromachining Overview Participant Guide MEMS Micromachining Overview Participant Guide

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Date added: 01/26/2010
Date modified: 01/07/2014
Filesize: 3.46 MB
Downloads: 4391

MEMS Micromachining Overview Learning Module - Participant (Student) Guide

This learning module is an overview of the most common methods of micromachining processes used to fabricate micro-sized devices.  The three processes covered are bulk, surface and LIGA. Applications and examples of each are discussed as well as an overview of the unique fabrication methods for each process.

This learning module consists of a pre and post quiz, reading material and two activities.

Latest revision May, 2012

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