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Photolithography Overview for MEMS

This category includes the Photolithography Overview for MEMS Learning Module (Instructor guide, Participant guide and PowerPoint presentation).  The steps of photolithography as well as an overview of the various processes are covered.

The following SCME YouTube video can be used to support the concepts introduced in this learning module.

Photolithography Overview for MEMS (12:03 minutes)

Documents

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Photolithography Overview Participant Guide Photolithography Overview Participant Guide

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Date added: 01/28/2010
Date modified: 01/07/2014
Filesize: 2.47 MB
Downloads: 10253

Photolithography Overview for MEMS Learning Module - Participant (Student) Guide.  This guide contains a knowledge probe, lesson, and two activities.

Latest revision July 2012

Photolithography Presentation - narrated Photolithography Presentation - narrated

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Date added: 07/30/2012
Date modified: 07/30/2012
Filesize: 28.58 MB
Downloads: 3632

This narrated presentation is a summary of the photolithography processes used in MEMS fabrication.  For more detailed information on these processes, one should complete the Photolithography Overview Learning Module.

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