Photolithography Overview for MEMS

This category includes the Photolithography Overview for MEMS Learning Module (Instructor guide, Participant guide and PowerPoint presentation).  The steps of photolithography as well as an overview of the various processes are covered.

The following SCME YouTube video can be used to support the concepts introduced in this learning module.

Photolithography Overview for MEMS (12:03 minutes)

Documents

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Photolithography Overview Participant Guide Photolithography Overview Participant Guide

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Date added: 01/28/2010
Date modified: 03/31/2017
Filesize: 3.53 MB
Downloads: 10908

Photolithography Overview for MEMS Learning Module - Participant (Student) Guide.  This guide contains a knowledge probe, lesson, and two activities.

The purpose of this learning module is to provide you with an overview into the photolithography process used for microsystems fabrication and to allow you an opportunity to explore some of the basic concepts.

Latest revision March 2017

Photolithography Presentation - narrated Photolithography Presentation - narrated

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Date added: 07/30/2012
Date modified: 07/30/2012
Filesize: 28.58 MB
Downloads: 3830

This narrated presentation is a summary of the photolithography processes used in MEMS fabrication.  For more detailed information on these processes, one should complete the Photolithography Overview Learning Module.

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