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Photolithography Overview for MEMS
This category includes the Photolithography Overview for MEMS Learning Module (Instructor guide, Participant guide and PowerPoint presentation).
Documents
Photolithography Presentation - narrated
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| Date added: | 07/30/2012 |
| Date modified: | 07/30/2012 |
| Filesize: | 28.58 MB |
| Downloads: | 263 |
This narrated presentation is a summary of the photolithography processes used in MEMS fabrication. For more detailed information on these processes, one should complete the Photolithography Overview Learning Module.
Photolithography Overview Participant Guide
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| Date added: | 01/28/2010 |
| Date modified: | 07/30/2012 |
| Filesize: | 2.52 MB |
| Downloads: | 1122 |
Photolithography Overview for MEMS Learning Module - Participant (Student) Guide. This guide contains a knowledge probe, lesson, and two activities.