NewsFlash: Bosch surpasses 3 Billion sensors Sold!
You may or may not know that Bosch not only produces spark plugs but also fabricates hundreds of different MEMS sensors and actuators. They invented to "Bosch Process" which allows MEMS fabricators to create extemely high aspect ratio structures in silicon. Many of their MEMS sensor systems can be found in automobiles. Most new cars comming out on the market have over 50 MEMS devices imbedded in them!
"Bosch supplies sensors for a wide range of applications in the consumer electronics and automotive industries. These sensors measure pressure, acceleration, rotary motion, mass flow, and the earth's magnetic field. Bosch has been at the forefront of MEMS technology since it first emerged, and today it generates more sales in the extremely dynamic MEMS sensor market than any other supplier. "
Deposition for Microsystems Learning Module
This category include the Deposition Overview for Microsystems Learning Module (Instructor guide, Participant guide and PowerPoint presentation). This learning module provides an overview of the various deposition processes used to fabricate microsystems. Such processes include thermal oxidation, chemical vapor deposition (CVD), and physical vapor deposition (PVD).
The Science of Thin Films Kit (formerly Rainbow Wafer Kit) supports this learning module by providing the participants the opportunity to further explore thin films through an in-depth study of the thin film - silicon dioxide.
Deposition Overview for Microsystems Learning Module - Participant (Student) Guide
This learning module is an overview of the various deposition processes used in the manufacture of micro-sized devices or MEMS. Processes covered include thermal oxidation, chemical vapor deposition (CVD) and physical vapor deposition (PVD).
This learning module consists of a pre and post quiz, reading material and two activities.
Latest revision May 2014 (Added the Science of Thin Films Activity)
This is a narrated presentation that reviews the deposition process, its applications within microsystem fabrication, and the two deposition processes - spin-on and thermal oxidation.
This is a narrated presentation that reviews three deposition processes used for microsystems fabrication: chemical vapor deposition, physical vapor deposition, and electrodeposition.