Have you ever wondered where the term "MEMS" came from?
Read J.E. Wood's account:
Deposition for Microsystems Learning Module
This category include the Deposition Overview for Microsystems Learning Module (Instructor guide, Participant guide and PowerPoint presentation). This learning module provides an overview of the various deposition processes used to fabricate microsystems. Such processes include thermal oxidation, chemical vapor deposition (CVD), and physical vapor deposition (PVD).
The Science of Thin Films Kit (formerly Rainbow Wafer Kit) supports this learning module by providing the participants the opportunity to further explore thin films through an in-depth study of the thin film - silicon dioxide.
The following SCME YouTube videos can be used to support the concepts and activities introduced in this learning module.
Deposition Overview - Part I (12:53 minutes)
Deposition Overview - Part II (10:33)
Wet Thermal Oxidation Process Animation (1:11 minutes)
Dry Thermal Oxidation Process Animation (1:45 minutes)
Wet vs. Dry Oxidation Process Animation (2:01 minutes)
Deposition Overview for Microsystems Learning Module - Participant (Student) Guide
This learning module is an overview of the various deposition processes used in the manufacture of micro-sized devices or MEMS. Processes covered include thermal oxidation, chemical vapor deposition (CVD) and physical vapor deposition (PVD).
This learning module consists of a pre and post quiz, reading material and two activities.
Latest revision May 2014 (Added the Science of Thin Films Activity)
This is a narrated presentation that reviews the deposition process, its applications within microsystem fabrication, and the two deposition processes - spin-on and thermal oxidation.
This is a narrated presentation that reviews three deposition processes used for microsystems fabrication: chemical vapor deposition, physical vapor deposition, and electrodeposition.