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BioMEMS Learning Modules

Deposition for Microsystems Learning Module

This category include the Deposition Overview for Microsystems Learning Module (Instructor guide, Participant guide and PowerPoint presentation).  This learning module provides an overview of the various deposition processes used to fabricate microsystems.  Such processes include thermal oxidation, chemical vapor deposition (CVD), and physical vapor deposition (PVD).

The Science of Thin Films Kit (formerly Rainbow Wafer Kit) supports this learning module by providing the participants the opportunity to further explore thin films through an in-depth study of the thin film - silicon dioxide.

The following SCME YouTube videos can be used to support the concepts and activities introduced in this learning module.

Deposition Overview - Part I  (12:53 minutes)

Deposition Overview - Part II (10:33)

Wet Thermal Oxidation Process Animation (1:11 minutes)

Dry Thermal Oxidation Process Animation (1:45 minutes)

Wet vs. Dry Oxidation Process Animation (2:01 minutes)

Documents

Order by : Name | Date | Hits [ Descendent ]

Deposition Overview LM Participant Guide Deposition Overview LM Participant Guide

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Date added: 02/05/2010
Date modified: 05/13/2014
Filesize: 2.93 MB
Downloads: 2073

Deposition Overview for Microsystems Learning Module - Participant (Student) Guide

This learning module is an overview of the various deposition processes used in the manufacture of micro-sized devices or MEMS.  Processes covered include thermal oxidation, chemical vapor deposition (CVD) and physical vapor deposition (PVD).

This learning module consists of a pre and post quiz, reading material and two activities.

Latest revision May 2014 (Added the Science of Thin Films Activity)

Presentation:  Deposition Overview - Part I Presentation: Deposition Overview - Part I

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Date added: 09/04/2012
Date modified: 09/05/2012
Filesize: 11.63 MB
Downloads: 725

This is a narrated presentation that reviews the deposition process, its applications within microsystem fabrication, and the two deposition processes - spin-on and thermal oxidation.

Presentation:  Deposition Overview - Part II Presentation: Deposition Overview - Part II

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Date added: 09/04/2012
Date modified: 09/05/2012
Filesize: 9.26 MB
Downloads: 655

This is a narrated presentation that reviews three deposition processes used for microsystems fabrication:  chemical vapor deposition, physical vapor deposition, and electrodeposition. 

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