Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  A brief history of the term Micro Electro Mechanical Systems (MEMS)

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Etch Overview for Microsystems Learning Module

This category includes the Etch Overview for Microsystems Learning Module.  This learning module covers the various types of etch processes used in the fabrication of micro-sized devices or MEMS.  Such processes include chemical and physical etch, wet vs. dry etch, plasma etch, and RIE (reactive ion etch).

The following SCME YouTube videos can be used to support the concepts introduced in this learning module.

Etch Processes for Microsystems - Part 1 (15.26 minutes)

Etch Processes for Microsystems - Part II (14:55 minutes)

Documents

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Etch Overview for Microsystems Participant Guide Etch Overview for Microsystems Participant Guide

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Date added: 02/08/2010
Date modified: 05/16/2014
Filesize: 3.15 MB
Downloads: 8056

This learning module covers various types of etch processes that are used to fabricate microsystems (MEMS).  Processes that are covered include bulk and surface etching, wet vs. dry, and chemical vs. physical etching.  There are three activities to support this material. 

The Bulk Micromachining - An Etch Process activity requires the SCME Kit of the same name and must be completed under a fume hood.

NOTE:  The kit was formerly the Anisotropic Etch Kit

Latest Revision: May 2014 (Science of Thin Film Activity (formerly Rainbow Wafer) was revised)

Etch Processes for Microsystems - Part I Etch Processes for Microsystems - Part I

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Date added: 02/07/2013
Date modified: 12/06/2013
Filesize: 47.13 MB
Downloads: 3760

This narrated presentation covers the basics of etch processing as well as the types of wet etch processing that is used in the fabrication of microsystems.  Part II covers the dry processes.

February 2013

Etch Processes for Microsystems - Part II Etch Processes for Microsystems - Part II

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Date added: 02/07/2013
Date modified: 12/06/2013
Filesize: 43.39 MB
Downloads: 1684

This narrated presentation covers the basics of dry etch processing that is used in the fabrication of microsystems.  Part I covers the basics of etch processing as well as the types of wet etch processing that is used in the fabrication of microsystems.

February 2013

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