Details for Etch Overview for Microsystems Participant Guide

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Name:Etch Overview for Microsystems Participant Guide
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This learning module covers various types of etch processes that are used to fabricate microsystems (MEMS).  Processes that are covered include bulk and surface etching, wet vs. dry, and chemical vs. physical etching.  There are three activities to support this material. 

The Bulk Micromachining - An Etch Process activity requires the SCME Kit of the same name and must be completed under a fume hood.

NOTE:  The kit was formerly the Anisotropic Etch Kit

Latest Revision: April 2017

Filename:Etch_Overview_LM_PG.pdf
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Created On: 02/08/2010 15:46
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Last updated on: 04/06/2017 12:34
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