Details for A brief history of the term Micro Electro Mechanical Systems (MEMS)

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Name:A brief history of the term Micro Electro Mechanical Systems (MEMS)
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A brief history of the term Micro Electro Mechanical Systems (MEMS) 

J.E. Wood

Professor, Mechanical Engineering University of New Mexico Albuquerque, NM 

22 June 2016

 

Filename:JW_History_of_MEMS.pdf
Filesize: 53.45 kB
Filetype:pdf (Mime Type: application/pdf)
Creator:mpleil
Created On: 06/21/2016 16:39
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Last updated on: 06/23/2016 15:54
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