Details for MEMS Micromachining Overview Participant Guide

Name:MEMS Micromachining Overview Participant Guide

MEMS Micromachining Overview Learning Module - Participant (Student) Guide

This learning module is an overview of the most common methods of micromachining processes used to fabricate micro-sized devices.  The three processes covered are bulk, surface and LIGA. Applications and examples of each are discussed as well as an overview of the unique fabrication methods for each process.  Activities allow you to further enhance your micromachining vocabulary as well as further explore these processes.

This learning module consists of a pre and post quiz, reading material and two activities.

Revised June 2017

Filesize: 7.44 MB
Filetype:pdf (Mime Type: application/pdf)
Created On: 01/26/2010 16:08
Maintained by:Publisher
Hits:12355 Hits
Last updated on: 06/21/2017 15:24
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