Details for Deposition Overview LM Participant Guide

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Name:Deposition Overview LM Participant Guide
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Deposition Overview for Microsystems Learning Module - Participant (Student) Guide

This learning module is an overview of the various deposition processes used in the manufacture of micro-sized devices or MEMS.  Processes covered include thermal oxidation, chemical vapor deposition (CVD) and physical vapor deposition (PVD).

This learning module consists of a pre and post quiz, reading material and three activities.

Latest revision March 2017

Filename:Deposition_Overview_LM_PG.pdf
Filesize: 19.99 MB
Filetype:pdf (Mime Type: application/pdf)
Creator:mjwillis
Created On: 02/05/2010 15:48
Viewers:Everybody
Maintained by:Publisher
Hits:7115 Hits
Last updated on: 03/29/2017 11:23
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