Image Fabrication Topics
This Category includes the following MEMS Fabrication Learning Modules for download to registered users. There are some sample materials available for non-registered users.
- Crystallography Overview for MEMS (Crystallography Kit)
- Deposition Overview for Microsystems (Science of Thin Films Kit (formerly Rainbow Wafer))
- Photolithography Overview
- Etch Overview (Bulk Micromachining - An Etch Process Kit (formerly Anisotropic Etch))
- MTTC Pressure Sensor Process (Surface Micromachining Lift-off Kit, Bulk Micromachining An Etch Process Kit, and Micro Pressure Sensor Process Kit)
- MEMS Micromachining Overview (LIGA Micromachining - Lithography & Electroplaing Kit)
- LIGA Micromachining Activities
- A Systematic Approach to Problem Solving NEW!
- Learning Microsystems through Problem Solving Kit (MEMS Innovators Activity and Kit)