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Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  pdf  A brief history of the term Micro Electro Mechanical Systems (MEMS)

See a map of who's downloading (last updated 7/11/16)



Folder A Systematic Approach to Problem Solving
Folder Crystallography Animations
Folder Crystallography LM
Folder Deposition for Microsystems Learning Module
Folder Etch Overview for Microsystems Learning Module
Folder LIGA Micromachining Activities and Presentation
Folder MEMS Micromachining Overview Learning Module
Folder MTTC Pressure Sensor Process Learning Module
Folder Photolithography Overview for MEMS


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