Have you ever wondered where the term "MEMS" came from?
Read J.E. Wood's account:
Click Here: pdf A brief history of the term Micro Electro Mechanical Systems (MEMS)
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Industries in Micro/Nano
Commercial sites creating Micro/Nano devices as well as industry groups including ElectroIG (SmallTimes), MIG (MEMS Industry Group), MANCEF and the like.