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Have you ever wondered where the term "MEMS" came from?

Read J.E. Wood's account:

Click Here:  pdf  A brief history of the term Micro Electro Mechanical Systems (MEMS)

See a map of who's downloading (last updated 7/11/16)

 

Folder MTTC Pressure Sensor Process Learning Module

This category includes the MTTC Pressure Sensor Process Learning Module, a fabrication process for a MEMS Pressure Sensor developed by the Manufacturing Technology Training Center (MTTC) at the University of New Mexico (UNM).  Materials include Instructor guide, Participant guide and PowerPoint presentation.

There are three (3) kits available through SCME that support this learning module:

  • Micro Pressure Sensor Process Model Kit
  • Surface Micromachining - Lift-Off Process Kit (formerly Lift-off)
  • Bulk Micromachining - An Etch Process Kit (formerly Anisotropic Etch)

 

Documents

archive MEMS Model AC Examples

By 51 downloads

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MEMS Model AC Examples.zip

This folder contains supporting information for the MEMS Process Model Activity. There are two (2) sample animations of the pressure sensor process and a subfolder with pictures of process models that were created during a SCME Pressure Sensor Process workshop.

pdf MTTC Pressure Sensor Instructor Guide Popular

By 136 downloads

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MTTC Pressure Sensor LM IG.pdf

This pdf contains all of the units for the MTTC Pressure Sensor Learning Module - Instructor Guide.  This learning module describes the operation of and the fabrication of a MEMS pressure sensor.  This particular process was developed by the Manufacturing Technology Training Center (MTTC) at the University of New Mexico.

This learning module consists of a primary knowledge unit, four (4) activities, and two assessments (pre/post).  The first activity - MTTC Pressure Sensor Process Activity - requires a cleanroom with specific equipment.  The Surface Micromachining: Lift-off and Bulk Micromachining: Etch activities require a well-ventilated area and/or fumehood as well a supporting SCME kit. 

To request one or more of these kits, read the kit descriptions.

Latest learning module revision - August 2017

pdf MTTC Pressure Sensor Participant Guide Popular

By 12522 downloads

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MTTC Pressure Sensor LM PG.pdf

This pdf contains the materials for the MTTC Pressure Sensor Learning Module - Participant Guide. This learning module describes the operation of and the fabrication of a MEMS pressure sensor.  This particular process was developed by the Manufacturing Technology Training Center (MTTC) at the Univeristy of New Mexico.

This learning module consists of a primary knowledge unit and four (4) activities and pre- and post-assessments.

Latest learning module revision - August 2017

archive MTTC Pressure Sensor Process Presentations Popular

By 131 downloads

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MTTC_Process Presentations.zip

This folder contains two presentations. The MTTC Process Storyboard shows the step-by-step process for fabricating a MEMS pressure sensor. The MTTC Process Storyboard Backside shows the "actual result" of each process step.  These presentations have been consolidated into one presentation below. See "MTTC PS Process LM Presentation" below.

Presentations revised June 2014

document MTTC PS Process LM Presentation

By 78 downloads

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MTTC_PS_Process_LM_Presentation.pptx

This is the PowerPoint presentation that supports the SCOs in the MTTC Pressure Sensor Process Learning Module. This presentation is a storyboard that outlines the step-by-step process for the fabrication of a MEMS pressure sensor (PS). Each step of the process is presented in a slide with the step description, supporting graphics, and process parameters. Following each process step is an actual picture of a process wafer at the end of that specific process step.

This presentation can be used to present the primary knowledge SCO  It can also be used by the participants when completing the Micro Pressure Sensor Process Activity.

Presentations was revised June 2014

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